CHEMICAL LIQUID CONTAINER

摘要

A chemical liquid container having a container body (1), a cap (2), an intermediate member (3), and an intermediate plug (4). The cap (2) is provided with a chemical liquid discharge path (25) and an air introduction path (28). The intermediate member (3) has a tube body (35) projecting toward the inside of the container body (1). A hydrophilic filter (29) is provided between a chemical liquid introduction path (34) and the chemical liquid discharge path (25), and a filter (37) is provided between an air supply path (36), communicating with the air introduction path (28), and an air delivery path (43). The air delivery path (43) communicates with the inside of the container body (1) via a check valve. The inner peripheral surface of an annular valve (42) forming the check valve is in contact with the outer peripheral surface of the tube body (35), and the check valve allows airflow only in the direction toward the inside of the container body (1). The check valve of the chemical liquid container can be easily produced and can reliably prevent backflow of the chemical liquid.