| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a crystal silicon light emitting element capable of providing a wanted light emission wavelength at high efficiency, with the wavelength being variable. <P>SOLUTION: A p-type silicon substrate 10 made from single crystal is prepared and a plurality of nano Si posts 15 are formed on one surface of the p-type silicon substrate 10. The nano Si posts 15 form a homojunction together with the silicon substrate 10, representing cylindrical pillar projections. On the surface of the silicon substrate 10, a silicon oxide film 16 in the region except for the upper surface of the nano Si post 15, a third electrode 17 so provided as to cover at least a part of the side surface of the nano Si post 15, and an insulating film 18 covering the surface of the third electrode 17 are formed. Further, a transparent electrode 19 is provided which forms a Schottky barrier wall 30 by contacting at least the upper surface of the nano Si post 15. A metal electrode 20 is formed on the other surface of the silicon substrate 10. <P>COPYRIGHT: (C)2008,JPO&INPIT |
