| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate control apparatus absorbing pressure variation and having high controllability of a flow rate. SOLUTION: A flow rate detection means 8 for detecting a flow rate and outputting a flow rate signal and a flow rate control valve mechanism 10 for controlling the flow rate by changing a valve opening by a valve drive signal are arranged in a passage 6 where a fluid flows. In the flow rate control apparatus provided with a control means 44 for controlling the flow rate control valve mechanism 10 on the basis of a flow rate setting signal S0 inputted from the outside and the flow rate signal S1, a pressure detection means 42 for detecting the pressure of the fluid and outputting a pressure detection signal is arranged in the passage 6. The control means 44 has a first control mode for controlling a flow rate on the basis of the flow rate signal and the flow rate setting signal without using the pressure detection signal, has a second mode for controlling a flow rate on the basis of the flow rate signal obtained from the flow rate detection means, the control means 44 switches the first mode and the second mode selectively. COPYRIGHT: (C)2008,JPO&INPIT
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