TWO-DIMENSIONAL MICRO SCANNER

摘要

A two-dimensional micro optical scanner is provided to reduce the length of a second reflector by reducing the scanning angle of a beam scanned by a first scanner. A first scanner(10) includes a first reflector(11) which is shaken in a first shaking direction. A second scanner(20) includes a second reflector(21) which is shaken in a second shaking direction. An optical path conversion unit(30) transmits the beam scanned by the first scanner to the second scanner and includes a curved reflection surface. The curved reflection surface is used for reducing a scanning angle of the beam scanned by the first scanner, and irradiating the beam to the second reflector. The curved reflection surface is used for concentrating the light scanned by the first scanner on the second reflector.