| 摘要 |
PROBLEM TO BE SOLVED: To provide thermal treatment equipment capable of effectively cooling a flash lamp. SOLUTION: A reflector 52 is provided covering the array of the plurality of flash lamps 69 for radiating flash light, and a cooling box 20 is installed on the upper side of the reflector 52. A buffer space 21 is built inside the cooling box 20, and a plurality of jetting holes 22 communicated with the buffer space 21 are perforated through the bottom part of the cooling box 20 and the reflector 52. Each of the plurality of jetting holes 22 is provided so as to be positioned right above a gap between the lamps in the array of the plurality of flash lamps 69. A nitrogen gas jetted from the plurality of jetting holes 22 passes through the gap between the adjacent lamps in the array of the flash lamps 69 and is blown to a lamp light radiation window 53. The flash lamps 69 are effectively cooled by direct cooling by the nitrogen gas and the temperature decline of the lamp light radiation window 53. COPYRIGHT: (C)2008,JPO&INPIT
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