发明名称 |
Method of making a thermopile detector and package |
摘要 |
A method of making a radiation sensor wherein a plurality of thermopiles are formed on one wafer and a plurality of packages for the thermopiles are formed in another wafer. Each package includes a formed well covered by a window. The two wafers are bonded in a controlled gas or vacuum environment such that each thermopile resides in the well below the window of a package.
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申请公布号 |
US2008128620(A1) |
申请公布日期 |
2008.06.05 |
申请号 |
US20060566405 |
申请日期 |
2006.12.04 |
申请人 |
KRELLNER THEODORE J;STRAUB PETER J;TWINEY ROBERT |
发明人 |
KRELLNER THEODORE J.;STRAUB PETER J.;TWINEY ROBERT |
分类号 |
G01J5/00 |
主分类号 |
G01J5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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