| 摘要 |
A sample holder is provided with a base body; a plurality of protruding sections protruding from an upper plane of the base body; and at least one holding plate, which has a plurality of curved surface sections corresponding to each of the protruding sections, abuts to the leading edge section of the protruding section at a lower plane recess on the curved surface section and supports a sample on the upper plane protrusion on the curved surface section. Since the sample is supported by the curved surface sections of the holding plate, a contact area with the sample is extremely small, and apical angle sections and scratches on the contact section of the sample with the curved surface section can be remarkably reduced. As a result, particle generation due to sample abrasion is eliminated, and particles are prevented from sporadically re-adhering on the sample by entering into scratches and voids. |
