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发明名称
摘要
申请公布号	JP4095701(B2)	申请公布日期	2008.06.04
申请号	JP19970293458	申请日期	1997.10.09
申请人		发明人
分类号	C23C14/14;C23C14/34;C23C14/04;C23C14/35;C23C14/50;C23C14/54;C23C14/56;H01L21/203;H01L21/285;H01L21/768	主分类号	C23C14/14
代理机构		代理人
主权项
地址

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