发明名称 ELECTROPLATING METHOD FOR COATING A SUBSTRATE SURFACE WITH A METAL
摘要 The object of the present invention is a method of coating a surface of a substrate with copper by electroplating. According to the invention, this method comprises: a step during which the said surface to be coated is brought into contact with an electroplating bath while the said surface is not under electrical bias; a step of forming the coating during which the said surface is biased; a step during which the said surface is separated from the electroplating bath while it is under electrical bias; the aforementioned electroplating bath comprising, in solution in a solvent: a source of copper ions, with a concentration of between 0.4 and 40 mM; and at least one copper complexing agent.
申请公布号 EP1927129(A2) 申请公布日期 2008.06.04
申请号 EP20060831204 申请日期 2006.09.20
申请人 ALCHIMER 发明人 MONCHOIX, HERVE;RAYNAL, FREDERIC;DAVIOT, JEROME;GONZALEZ, JOSE
分类号 H01L21/288 主分类号 H01L21/288
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