,申请号JP19980202027-传众专利搜索

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发明名称
摘要
申请公布号	JP4094127(B2)	申请公布日期	2008.06.04
申请号	JP19980202027	申请日期	1998.07.16
申请人		发明人
分类号	C23C16/24;H01L21/20;C23C16/56;H01L21/205	主分类号	C23C16/24
代理机构		代理人
主权项
地址

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