发明名称 Device for separating two disc-shaped elements positioned one above the other when removing one
摘要 <p>The device has a lifting device for removal of disk-shaped elements (33,34) out of a support element (2) and for lifting an upper element out of the two disk-shaped elements. A holding device is provided for holding a lower disk-shaped element. The lifting device and the holding device are formed such that the force distribution produced by a vacuum force (F1) on a surface (35) of the a disk-shaped element differs in geometry from the force distribution produced by another vacuum force (F2) on another surface (36) of other disk-shaped element.</p>
申请公布号 EP1927433(A1) 申请公布日期 2008.06.04
申请号 EP20070022053 申请日期 2007.11.13
申请人 BRAIN, BERNHARD 发明人 BRAIN, BERNHARD
分类号 B24B37/34;H01L21/677;H01L21/683 主分类号 B24B37/34
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