| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotation development apparatus wherein the temperature of the whole of a matter to be treated is equally adjusted. SOLUTION: A jacket 4 for temperature adjustment is fitted to an opening part at the upper end of the cylindrical inner plate 21 of a cup 1. The jacket 4 consists of an upper plate 41, a lower plate 42 and a barrier 43 formed between the plates, and all of them are made of aluminum (aluminum alloy) excellent in heat conductivity. On the surfaces which can contact with a developer of the upper plate 41 and the barrier 43 constituting the jacket 4, a Teflon (R) coating 50 is formed. At an opening formed in the center of the jacket 4, a chuck 7 is arranged. A path 71 connected with a vacuum pump is formed in the shaft of this chuck 7, and fins 72 for improving heat transmission effect are provided in the outer periphery of the shaft. COPYRIGHT: (C)2005,JPO&NCIPI |
