| 摘要 |
An apparatus for conveying a substrate is provided to prevent damage to guide rollers by rotating the guide rollers at the same speed as a roller to minimize friction between the substrate and the guide rollers. An apparatus(220) for conveying a substrate includes a table(221), a substrate transfer roller(222), a contact unit(224), and guide rollers(230). The table is installed between process lines. The substrate transfer roller is installed on the table to rotate in a transfer direction of the substrate. The contact unit is formed in the substrate transfer roller, rotates according to rotation of the substrate transfer roller, and is in contact with the substrate to transfer the substrate in a rotational direction of the substrate transfer roller. The guide rollers are installed at both sides of the table in the transfer direction of the substrate and rotate at the same speed as the substrate transfer roller in order to prevent deflection of the substrate.
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