发明名称 Cantilever holder and scanning probe microscope including the same
摘要 A cantilever holder includes a glass substrate (130) on which a cantilever chip (110) is to be placed, a holding stage (140) to hold the glass substrate (130), a vibrator (138) fixed to the lower surface of the glass substrate (130), and a holding mechanism to position and hold the cantilever chip (110) at a position opposing the vibrator (138) through the glass substrate (130). The holding mechanism includes a press member (120) to press the cantilever chip (110) against the glass substrate (130). The press member (120) includes a notch (122) that tightly fits with the support (113).
申请公布号 EP1927845(A1) 申请公布日期 2008.06.04
申请号 EP20070022406 申请日期 2007.11.19
申请人 OLYMPUS CORPORATION 发明人 UE, YOSHIHIRO
分类号 G01Q10/00;G01Q30/08;G01Q30/14;G01Q30/20;G01Q60/32;G01Q60/38;G01Q70/02 主分类号 G01Q10/00
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