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发明名称
A method for forming a metal line of semiconductor device
摘要
申请公布号
KR100835463(B1)
申请公布日期
2008.06.04
申请号
KR20020037687
申请日期
2002.06.29
申请人
发明人
分类号
H01L21/768
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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