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发明名称
摘要
申请公布号
JP4093336(B2)
申请公布日期
2008.06.04
申请号
JP20000078277
申请日期
2000.03.21
申请人
发明人
分类号
C23C16/34;H01L21/318;C23C16/44
主分类号
C23C16/34
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代理人
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地址
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