| 摘要 |
A bubble jet cleaning unit is provided to improve capability of cleaning the substrate seated on a stage by extending nozzles enough to cover diagonal length of the substrate so that nozzles clean overall surface of a substrate when the stage is rotated. A bubble jet cleaning unit has a tank(132) for storing and supplying de-ionized water, a CDA(Clean Dry Air) generator(134), a supply line(136) for delivering de-ionized water and clean dry air, and a nozzle unit(140) for spraying cleaning solution to the substrate(102) placed on a stage(110). The nozzle unit placed above the substrate includes bubble jet nozzles(142) spraying cleaning agent to the substrate and a supply line(144) having enough length to cover diagonal length of the substrate.
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