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发明名称
APPARATUS AND PROCESS FOR SURFACE TREATMENT OF SUBSTRATE USING AN ACTIVATED REACTIVE GAS
摘要
申请公布号
EP1926840(A1)
申请公布日期
2008.06.04
申请号
EP20060803653
申请日期
2006.09.13
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
GARG, DIWAKAR;KROUSE, STEVEN, ARNOLD;ROBERTSON, ERIC, ANTHONY, III;MA, PINGPING
分类号
C23C16/452;C23C16/455;H01J37/32
主分类号
C23C16/452
代理机构
代理人
主权项
地址
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