| 摘要 |
A substrate transfer system, a stocker and an unmanned guided vehicle are provided to increase a substrate transferring efficiency and capability as well as improve the utilization of space within a manufacturing line. A substrate transfer system(100) comprises a stocker(110), and an unmanned guided vehicle(140). The stocker moves along first and second ports(112,114), a shelf(116), and a first moving path(138). The stocker includes a rack master(118) for carrying out cassettes(111) loaded with a substrate from the shelves to the first port, carrying in the cassettes from the shelves to the second port, and carrying in and out the cassettes to more than an m direction(m>=3, m is a natural number). The stocker stores the cassettes. The unmanned guided vehicle moves on the first and second ports and third and fourth ports by a second moving path(160), carries in and out the cassettes from the first and third ports to the second and fourth ports, and carries in and out the cassettes to more than an n direction(n>=3, n is a natural number). |
