发明名称 |
Method and apparatus for improving integrated circuit device performance using hybrid crystal orientations |
摘要 |
A method for implementing a desired offset in device characteristics of an integrated circuit includes forming a first device of a first conductivity type on a first portion of a substrate having a first crystal lattice orientation, and forming a second device of the first conductivity type on a second portion of the substrate having a second crystal lattice orientation. The carrier mobility of the first device formed on the first crystal lattice orientation is greater than the carrier mobility of the second device formed on the second crystal lattice orientation.
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申请公布号 |
US7382029(B2) |
申请公布日期 |
2008.06.03 |
申请号 |
US20050161337 |
申请日期 |
2005.07.29 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
PEKARIK JOHN J.;WANG XUDONG |
分类号 |
H01L29/76;H01L21/8234 |
主分类号 |
H01L29/76 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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