Oxime ester photoinitiators

摘要

Compounds of the formulae I, II, III, IV and V wherein R₁ i.a. is C₄-C₉cycloalkanoyl, C₁-C₁₂alkanoyl, C₄-C₆alkenoyl, or benzoyl; R₂ is for example phenyl, C₁-C₂₀alkyl, C₃-C₈cycloalkyl, C₂-C₂₀alkanoyl, or benzoyl; Ar₁ is R₄S-phenyl or NR₅R₆-phenyl, each of which optionally is substituted; or Ar₁ i.a. is optionally substituted; or Ar₁ is naphthyl or anthracyl each of which is unsubstituted or substituted; or Ar₁ is benzoyl, naphthalenecarbonyl, phenanthrenecarbonyl, anthracenecarbonyl or pyrenecarbonyl, each of which is unsubstituted or substituted, or Ar₁ is 3,4,5-trimethoxyphenyl, phenoxyphenyl or biphenyl; Ar₂ i.a. is optionally substituted, or naphthyl or anthracyl, each of which is unsubstituted or substituted, x is 2 or 3; M₁ when x is 2, for example is phenylene, naphthalene, anthracylene, each of which optionally is substituted; M₁, when x is 3, is a trivalent radical; M₂ for example is M₃ is for example C₁-C₁₂alkylene, cyclohexylene, or phenylene; n is 1-20; R₃ is for example hydrogen or C₁-C₁₂alkyl; R₃' i.a. is C₁-C₁₂alkyl; substituted or -O-interrupted C₂-C₆alkyl; R₄ is for example hydrogen, or C₁-C₁₂alkyl; and R₅ and R₆ independently of each other i.a. are hydrogen, C₁-C₁₂alkyl, or phenyl; are suitable as photoinitiators in particular in resist applications.