发明名称 Use of expanding material oxides for nano-fabrication
摘要 This invention relates to a method of fabricating nano-dimensional structures, comprising: depositing at least one deformable material upon a substrate such that the material includes at least one portion; and creating an oxidizable layer located substantially adjacent to the deposited deformable material such that at least a portion of the oxidized portion of the oxidizable layer interacts with the at least one portion of the deformable material to apply a localized pressure upon the at least one portion of the deformable material.
申请公布号 US7381631(B2) 申请公布日期 2008.06.03
申请号 US20050174798 申请日期 2005.07.05
申请人 HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. 发明人 MARDILOVICH PETER;KORNILOVICH PAVEL;HOFFMAN RANDY
分类号 H01L21/20;H01L21/36 主分类号 H01L21/20
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