| 摘要 |
A structure ( 113 b) which includes an overhang and a support portion supporting substantially the center of the overhang, and in which the area of the support portion is smaller than the area of the overhang in the two-dimensional direction of an upper electrode ( 1110 b) is formed on the upper electrode ( 110 a) in a region above each lower electrode 105 a in one-to-one correspondence with the lower electrode ( 105 a). An object of surface shape sensing, e.g., the tip of a finger ( 1602 ) touches the surface of the overhang of the structure ( 113 b), and the support portion of the structure ( 113 b) whose overhang is in contact with the object of sensing pushes down a portion of the upper electrode ( 110 a) toward the lower electrode ( 105 a), thereby deforming the upper electrode ( 110 a).
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