发明名称 Thin film transistor with multiple gates fabricated using super grain silicon crystallization
摘要 A thin film transistor with multiple gates is fabricated using a super grain silicon (SGS) crystallization process. The thin film transistor a semiconductor layer formed in a zigzag shape on an insulating substrate, and a gate electrode intersecting with the semiconductor layer. The semiconductor layer has a high-angle grain boundary in a portion of the semiconductor layer that does not cross the gate electrode.
申请公布号 US7381990(B2) 申请公布日期 2008.06.03
申请号 US20040023640 申请日期 2004.12.29
申请人 发明人
分类号 H01L21/20;H01L27/108;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/423;H01L29/786 主分类号 H01L21/20
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