| 摘要 |
A rubbing head unit and rubbing equipment having the same are provided to remove particles generated from a rubbing roller before the particles are attached to an alignment layer, thereby preventing the alignment layer from being polluted by the particles. A rubbing roller(10) comprises a roller main body(2) for rubbing an alignment layer formed on a substrate, and rotation shafts(4) respectively disposed in both ends of the roller main body. A rubbing roller cover(20) is coupled with each rotation shaft of the rubbing roller and covers a part of the roller main body. A particle removing unit(30) comprises a main body, a fluid spray nozzle, and a fluid supply unit. Fluid provided from the fluid supply unit to the main body is sprayed to the alignment layer formed on the substrate through the fluid spray nozzle. By the fluid sprayed to the alignment layer, particles attached on the alignment layer are removed from the alignment layer. A particle suction unit sucks suspended particles generated from the rubbing roller by rotation of the rubbing roller before the particles are attached to the alignment layer. Therefore, the particles are prevented from being attached to the alignment layer. The rubbing roller cover comprises a first cover plate(22) substantially vertical to the substrate, and a second cover plate(24) prolonged from an end of the first cover plate to be substantially parallel to the substrate. In the surface of the roller main body, a rubbing cloth(9) contacted with the substrate, where the alignment layer is formed, is disposed. |
