| 摘要 |
A robot moving device is provided to prevent contamination of a board and to reduce labor cost and a stop of a production line by removing a particle generated in a clean room automatically with a cleaning unit installed at a moving unit of a robot. A robot moving device comprises the followings: a rail(70) formed on a floor surface of a clean room; a moving unit(40) moving along the rail, connected with a robot(90) to shift a board or a cassette; a cleaning unit(50) connected to the moving unit, to suck a particle around the rail; a vacuum unit(60) supplying sucking force to the cleaning unit, to make the cleaning unit suck the particle; and a control unit(30) controlling operation of at least one of the vacuum unit, the cleaning unit, and the moving unit.
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