CHARGED PARTICLE BEAM APPARATUS, METHOD FOR CONTROLLING CHARGED PARTICLE, AND FREQUENCY ADJUSTMENT APPARATUS

摘要

A charged particle irradiation device and a charged particle control method are provided to control a charged particle beam by controlling a voltage applied to each of acceleration grids. A charged particle generation unit generates charged particles. A plurality of separate acceleration grids(516a,516b) receive the charged particles and output charged particle beams. A control unit controls respectively the electric potentials of the separate acceleration grids in order to control independently the strength of the corresponding charged particles. A shielding grid(515) is installed between the charged particle generation unit and the acceleration grid. The acceleration grid includes at least one acceleration grid beam hole. The shielding grid includes at least one shielding grid beam hole. An area of the acceleration grid beam hole is smaller than an area of the shielding grid beam hole.