| 摘要 |
An apparatus for transferring substrates is provided to detachably install a guide roller for supporting a side surface of the substrates moved by a transfer shaft to thereby improve the productivity thereof. An apparatus for transferring substrates includes a plurality of transfer shafts and a guide member. The transfer shafts are arranged in parallel. A plurality of transfer rollers being in contact with the substrates are installed on the transfer shafts. The guide member guides the substrates moved by the transfer shafts. The guide member includes a plurality of guide rollers(246) and a plurality of bearings(244). The guide rollers are rotated with being in contact with the side surfaces of the substrates. The bearings rotatably support each of the guide rollers and are detachably attached to the guide roller.
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