发明名称 SEMICONDUCTOR DEVICES HAVING MIM CAPACITOR AND METHOD OF MAKING THE SAME
摘要 A semiconductor device having an MIM capacitor and a manufacturing method of the same are provided to simplify a manufacturing process by using only one additional mask. A first dielectric layer(110) and a first interlayer dielectric(120) are deposited on a top layer(100) after a top layer wiring process is performed. The first dielectric layer and the first interlayer dielectric are removed by patterning a region connected directly to the top layer. The first interlayer dielectric is etched by patterning an upper electrode region of the capacitor. A pad and a top electrode of capacitor are formed by stacking and patterning a metal layer. A second dielectric layer(140), a second interlayer dielectric(150), and a third dielectric layer(160) are stacked and patterned.
申请公布号 KR100834238(B1) 申请公布日期 2008.05.30
申请号 KR20060134143 申请日期 2006.12.26
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 KANG, MYUNG IL
分类号 H01L27/04 主分类号 H01L27/04
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