发明名称 |
MANUFACTURING DEVICE AND METHOD OF ELECTRONIC COMPONENT |
摘要 |
An apparatus and a method of manufacturing electronic components are provided to increase the effect of removing particles from surfaces of the electronic components by contacting a cleaning roller with the electronic components every corner of the components. A receptacle(2) receives a packaged substrate(8), and an individualization unit(3) separates the packaged substrate into plural electronic components. A cleaning unit(4) has a cleaning part for cleaning the electronic components. The cleaning unit has a water supply part for supplying water to a corresponding reservoir and a cleaning roller(14) provided over the reservoir. The cleaning roller comes in contact with the electronic components as the cleaning roller is rotated. A rotation shaft of the cleaning roller is driven by an air motor.
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申请公布号 |
KR20080047976(A) |
申请公布日期 |
2008.05.30 |
申请号 |
KR20070117088 |
申请日期 |
2007.11.16 |
申请人 |
TOWA CORPORATION |
发明人 |
YAMAMOTO MASAYUKI;UEBAYASHI SATORU;HINATSU SHINGO |
分类号 |
H01L21/301;H01L21/56;H01L21/78 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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