发明名称 MANUFACTURING DEVICE AND METHOD OF ELECTRONIC COMPONENT
摘要 An apparatus and a method of manufacturing electronic components are provided to increase the effect of removing particles from surfaces of the electronic components by contacting a cleaning roller with the electronic components every corner of the components. A receptacle(2) receives a packaged substrate(8), and an individualization unit(3) separates the packaged substrate into plural electronic components. A cleaning unit(4) has a cleaning part for cleaning the electronic components. The cleaning unit has a water supply part for supplying water to a corresponding reservoir and a cleaning roller(14) provided over the reservoir. The cleaning roller comes in contact with the electronic components as the cleaning roller is rotated. A rotation shaft of the cleaning roller is driven by an air motor.
申请公布号 KR20080047976(A) 申请公布日期 2008.05.30
申请号 KR20070117088 申请日期 2007.11.16
申请人 TOWA CORPORATION 发明人 YAMAMOTO MASAYUKI;UEBAYASHI SATORU;HINATSU SHINGO
分类号 H01L21/301;H01L21/56;H01L21/78 主分类号 H01L21/301
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