| 摘要 |
PROBLEM TO BE SOLVED: To provide a focus detection device for a microscope, wherein an automatic focus controllable range is wide and focus accuracy is high, and to provide a microscope having this device. SOLUTION: The focus detection device 200 for the microscope includes: a first projecting optical system 20 for projecting a pattern formed by a single slit on a specimen 1 via an objective lens 3 in order to detect focus; a second projecting optical system 30 for projecting a pattern formed by a plurality of slits on the specimen via the objective lens in order to detect a focus; an imaging optical system 41 by which the pattern formed by the single slit and the pattern formed by the plurality of slits, both of which are projected on the specimen, are imaged on the conjugate face of the specimen via the objective lens; and an imaging means 40 disposed so that the conjugate face and an imaging face coincide. Based on a signal from the imaging device, the detection device 200 detects the focus by selecting the first or second projecting optical system. COPYRIGHT: (C)2008,JPO&INPIT |
