| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for conveying an object to be processed capable of achieving a high-speed tact of a vacuum processor. SOLUTION: An object to be processed is transported while discharging air in a vacuum chamber into which the object to be processed has been conveyed so that the pressure moves to the high vacuum side, and ventilating in a vacuum chamber from which the object to be processed has been conveyed out so that the pressure moves to the atmospheric pressure side. COPYRIGHT: (C)2008,JPO&INPIT
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