| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a micro-machine having excellent switching performance and high reliability in a high yielding ratio. SOLUTION: The method for manufacturing the micro-machine having movable electrodes having a cantilever structure, includes steps of: preparing a substrate, a step of forming at least a suction electrode on the substrate; forming a first sacrificial layer so as to cover the suction electrode; selectively forming a second sacrificial layer on the first sacrificial layer covering the stepped portion of the suction electrode; forming a movable electrode on the first sacrificial layer and the second sacrificial layer; and removing the first sacrificial layer and the second sacrificial layer. COPYRIGHT: (C)2008,JPO&INPIT
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