| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an actuator device in which a characteristic of a piezoelectric element is made uniform and a manufacturing method of a liquid injection head. <P>SOLUTION: The method comprises a process for forming a test pattern 400 which is electrically discontinuous with an electrode of the piezoelectric element and has the same layer as an upper electrode of the piezoelectric element on a substrate, covering the test pattern with a protection film 200 covering the piezoelectric element, simultaneously etching a region facing the upper electrode of the test pattern 400 of the protection film 200 with an opening part formed in the protection film 200 so as to form an inspection opening part 204, measuring an electric resistance value of the upper electrode of the test pattern 400 in a first state where the inspection opening part 204 is not formed in the test pattern 400, measuring the electric resistance value of the upper electrode of the test pattern 400 in a second state where the protection film 200 having the inspection opening part 204 is formed in the test pattern 400 and acquiring etching quantity of the upper electrode based on the electric resistance value in the first state and the electric resistance value in the second state. <P>COPYRIGHT: (C)2008,JPO&INPIT |
