| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for fabricating an actuator in which reliability is enhanced by depositing a zirconium layer having no abnormal growth, and to provide the actuator. <P>SOLUTION: The method for fabricating an actuator having a diaphragm on one side of a substrate 110, and a piezoelectric element 300 consisting of a lower electrode 60, a piezoelectric layer 70 and an upper electrode 80 provided on the diaphragm comprises a step for forming a zirconium layer on one side of a substrate 300 by sputtering, and a step for forming a zirconium oxide layer 55 by thermally oxidizing the zirconium layer. The step for forming a zirconium layer repeats a high pressure step for forming a first zirconium layer having a thickness of 30-60 nm by a relatively high sputter pressure, and a low pressure step for forming a second zirconium layer having a thickness of 30-60 nm by a sputter pressure lower than that in the high pressure step alternately two times or more thus depositing the zirconium layer continuously such that the desired total film thickness falls within 150 nm in the final low pressure step. <P>COPYRIGHT: (C)2008,JPO&INPIT |
