| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave device suppressing frequency variation during surface mounting. SOLUTION: The surface acoustic wave device according to the present invention includes a piezoelectric substrate 11, an interdigital transducer 12 and a pad electrode provided on the piezoelectric substrate 11, a resin wall 14 provided to surround an excitation region of the interdigital electrode 12 on the piezoelectric substrate 11, a top plate 15 covering an opening portion of the resin wall 14 to seal the excitation region, an external electrode 16 provided on the top plate 15 and connected to the pad electrode 13, and a via electrode 17 provided in the top plate 15 and resin wall 14 and connecting the pad electrode 13 and external electrode 16 to each other, wherein the via electrode 17 is divided into a first via electrode 17a disposed on the side of the piezoelectric substrate 11 and a second via electrode 17b disposed on the side of the top plate 15, and the center position of the first via electrode 17a and the center position of the second via electrode 17b are made different. COPYRIGHT: (C)2008,JPO&INPIT
|
