| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of observing a sample in a liquid precisely. SOLUTION: A head 7 is mounted on a base unit 13 via a donut type cover 15. A transparent body 16 in which a cantilever 2 with a probe 3 attached to a distal end thereof is installed is fitted in the space of the cover 15. A light source 1 for illuminating light to the back of the cantilever and a photodetector 5 for detecting the reflected light from the back are provided in the head 7. A scanner 10 mounting a sample 8 that is arranged oppositely to the probe 3 in the base unit 13. The scanner 10 is supported by a scanner holder 11 and the scanner holder 11 is moved by a stage driving mechanism 12 through a sample stage 14. A liquid pool 18 is provided on the upper surface of a collar of the scanner holder11. COPYRIGHT: (C)2008,JPO&INPIT
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