| 摘要 |
PROBLEM TO BE SOLVED: To form an ink feeding port stably and accurately by suppressing a variation in the opening width of the ink feeding port which is caused by the pin holes of a substrate. SOLUTION: A process is included for perforating a Si substrate for the ink feeding port by an anisotropic etching. The substrate concerned of an inkjet recording head has an ink-delivery energy generation element, a semi-conductor electric circuit element for electrically actuating the ink-delivery energy generation element, a channel for making the energy from the ink-delivery energy generation element affect the ink, an outlet port for discharging the ink affected by the energy concerned and the ink feeding port for feeding the ink to the channel concerned. At the stage when the ink-delivery energy generation element and the semi-conductor electric circuit element were made, the film layer is eliminated by the method that an elimination advance speed for eliminating the film layer formed in the rear surface of the substrate is faster than the eliminating advance speed of the Si substrate. COPYRIGHT: (C)2008,JPO&INPIT
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