发明名称 SEMICONDUCTOR COMPONENT ARRANGEMENT AND METHOD FOR PRODUCING THEREOF
摘要 A semiconductor component arrangement and method for producing thereof is disclosed. One embodiment provides at least one power semiconductor component integrated in a semiconductor body and at least one logic component integrated in the semiconductor body. The logic component includes a trench extending into the semiconductor body proceeding from a first side, at least one gate electrode arranged in the trench and insulated from the semiconductor body by a gate dielectric, and at least one source zone and at least one drain zone of a first conduction type, which are formed in the semiconductor body in a manner adjacent to the gate dielectric and in a manner spaced apart from one another in a peripheral direction of the trench and between which at least one body zone of a second conduction type is arranged.
申请公布号 US2008121991(A1) 申请公布日期 2008.05.29
申请号 US20070771375 申请日期 2007.06.29
申请人 INFINEON TECHNOLOGIES AUSTRIA AG 发明人 ZUNDEL MARKUS;KRISCHKE NORBERT
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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