发明名称 |
STANDARD REFERENCE COMPONENT FOR CALIBRATION, FABRICATION METHOD FOR THE SAME, AND SCANNING ELECTRON MICROSCOPE USING THE SAME |
摘要 |
The present invention provides a standard reference component for calibration for performing magnification calibration used in the scanning electron microscope with high precision, and provides a scanning electron microscope technique using it. Provided is a standard reference component for calibration for calibrating a scanning electron microscope that measures a length of a pattern in an observation area from information on the intensity of secondary electrons or reflected electrons generated by scanning an incident electron beam in the observation area on a measuring sample, having: a first substrate on which a multiple-layer is laminated and a second substrate with a recess for holding the first substrate, wherein the first substrate is held in the recess of the second substrate so that a normal direction of the multiple-layer surface may be roughly perpendicular to a normal direction of the second substrate surface, and the multiple-layer has a multiple-layer structure of a film containing silicon and a film containing molybdenum.
|
申请公布号 |
US2008121791(A1) |
申请公布日期 |
2008.05.29 |
申请号 |
US20070939596 |
申请日期 |
2007.11.14 |
申请人 |
NAKAYAMA YOSHINORI;SOHDA YASUNARI;HITOMI KEIICHIRO;KOYANAGI HAJIME |
发明人 |
NAKAYAMA YOSHINORI;SOHDA YASUNARI;HITOMI KEIICHIRO;KOYANAGI HAJIME |
分类号 |
H01J37/26;G01D18/00 |
主分类号 |
H01J37/26 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|