ELECTRON BEAM IRRADIATION SYSTEM

摘要

In an electron beam irradiation system, a sample (4) housed in a chamber (2) is irradiated with an electron beam (E) and the energy of the electron beam, with which the sample (4) is irradiated, is measured by an electron beam detector (7). The detection surface (7a) of the electron beam detector (7) is covered with a conductive light-shielding film (7b), so that, when the electron beam detector (7) detects the electron beam (E), the effects of visible light, ultraviolet, and other light in the chamber (2) are eliminated. This enables the energy of the electric beam, with which the sample (4) is irradiated, to be accurately measured.