| 摘要 |
PROBLEM TO BE SOLVED: To adjust the temperature of treatment fluid such as an ozone gas to be supplied into a treatment container to a desired temperature without providing a heater or the like separately. SOLUTION: The treatment system comprises a treatment container 30 for housing a body to be treated, a temperature adjusting member 91 for adjusting the temperature of the treatment container 30, and treatment fluid generation parts 40 and 41 for generating the treatment fluid, temperature adjustment flow paths 95, 96 and 97 to be in thermal contact with the treatment container 30 are provided, and the treatment fluid generated in the treatment fluid generation parts 40 and 41 is supplied through the temperature adjustment flow paths 95, 96 and 97 into the treatment container 30. By making the treatment fluid generated in the treatment fluid generation parts 40 and 41 pass through the temperature adjustment flow paths 95, 96 and 97 to be in thermal contact with the treatment container 30, the temperature is adjusted utilizing the heat of the treatment container 30. COPYRIGHT: (C)2008,JPO&INPIT
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