发明名称 Enhanced local interconnects employing ferroelectric electrodes
摘要 A ferroelectric device employs ferroelectric electrodes as local interconnect(s). One or more circuit features are formed within or on a semiconductor body. A first dielectric layer is formed over the semiconductor body. Lower contacts are formed within the first dielectric layer. A bottom electrode is formed over the first dielectric layer and on the lower contacts. A ferroelectric layer is formed on the bottom electrode. A top electrode is formed on the ferroelectric layer. A second dielectric layer is formed over the first dielectric layer. Upper contacts are formed within the second dielectric layer and in contact with the top electrode. Conductive features are formed on the upper contacts.
申请公布号 US2008121953(A1) 申请公布日期 2008.05.29
申请号 US20060519313 申请日期 2006.09.12
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 SUMMERFELT SCOTT R.
分类号 H01L27/115;H01L21/8246 主分类号 H01L27/115
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