FLUORINATED POLYMERS FOR USE IN IMMERSION LITHOGRAPHY
摘要
The present invention relates to partially fluorinated (meth)acrylic polymers that can be blended with other (meth)acrylic polymers to provide enhanced surface properties.
申请公布号
WO2008021291(A3)
申请公布日期
2008.05.29
申请号
WO2007US17869
申请日期
2007.08.14
申请人
E. I. DU PONT DE NEMOURS AND COMPANY;FARNHAM, WILLIAM, BROWN;MOUDGIL, SUNITI
