| 摘要 |
PROBLEM TO BE SOLVED: To provide a suitable recording medium having a protective overcoat of highly tetrahedral amorphous carbon and a method for its production. SOLUTION: The diamond-like carbon material of this invention is highly tetrahedral, that is, it features a large number of the sp<SP>3</SP>carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range order, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving magnetic field, which promotes resonant ionization and ion beam homogenization. COPYRIGHT: (C)2008,JPO&INPIT
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