摘要 |
PROBLEM TO BE SOLVED: To make the wiring easy especially from contact to the substrate and to prevent the electric poor contact, regarding the electric signal connecting coordinate converting device to be used for the probe card capable of corresponding to the small pitched pad. SOLUTION: The coordinate converting device is characteristically constituted of at least two terminals which are independently move in the yz plane, the input terminal of the first wiring group corresponding to the one of the output terminal of the probe, at the time of being in contact and continuity, the wall surface of the first terminal of the input terminal of the first wiring group is brought into contact with the one side surface of the probe output terminal, and also the wall surface of the second terminal is brought into contact with the other side surface. COPYRIGHT: (C)2008,JPO&INPIT
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