| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem in which a returning scan period becomes disincentive for speeding up of scanning of target region with a laser beam since displacement action of a lens or a reflection mirror is necessary for a returning scan in which the emission position of the laser beam is returned to the top position of a line scanning. SOLUTION: A scanning mirror 6 being a scanning optical component has a form in which a cylindrical curved concave face 6a (or 6c) and a convex face 6b are alternately layered, the scanning mirror 6 is driven in two directions which perpendicularly cross to each other so that the direction of the laser light reflected on the scanning mirror 6 is displaced to a line scanning direction for a scanning one line and to a direction which is nearly perpendicular to the line scanning direction, and thus, the concave face and the convex face are alternately and subsequently traced with the laser beam. When the scan of one line is completed, the displaced position of the scanning mirror 6 in the line scanning direction is located at the emission position of the laser beam corresponding to the top position of the line scanning. COPYRIGHT: (C)2008,JPO&INPIT
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