发明名称 Thin Film Elastic Wave Resonator
摘要 An upper electrode ( 50 ) includes a first electrode section ( 51 ) formed in a circular shape and a second electrode section ( 52 ) and a third electrode section ( 53 ) formed in a fan-shaped manner outside of the first electrode section ( 51 ). The first, second, and third electrode sections ( 51 to 53 ) are electrically separated from one another via an insulating region. A lower electrode ( 30 ) includes a fourth electrode section ( 31 ) formed in a circular shape and a fifth electrode section ( 32 ) and a sixth electrode section ( 33 ) formed in a fan-shaped manner outside of the fourth electrode section ( 31 ). Similarly, the fourth, fifth, and sixth electrode sections ( 31 to 33 ) are electrically separated from one another via an insulating region. Further, the fourth electrode section ( 31 ) is provided so as to face the first electrode section ( 51 ) via the piezoelectric body ( 40 ), the fifth electrode section ( 32 ) is provided so as to face the second electrode section ( 52 ) via the piezoelectric body ( 40 ), and the sixth electrode section ( 33 ) is provided so as to face the third electrode section ( 53 ) via the piezoelectric body ( 40 ), respectively.
申请公布号 US2008122321(A1) 申请公布日期 2008.05.29
申请号 US20050666135 申请日期 2005.12.06
申请人 IWASAKI TOMOHIRO;ONISHHI KEIJI;NAKATSUKA HIROSHI 发明人 IWASAKI TOMOHIRO;ONISHHI KEIJI;NAKATSUKA HIROSHI
分类号 H01L41/047;H03H9/54 主分类号 H01L41/047
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