发明名称 |
Semiconductor devices and methods of manufacture thereof |
摘要 |
Semiconductor devices and methods of manufacture thereof are disclosed. A preferred embodiment comprises a method of forming an insulating material layer. The method includes forming a barrier layer and forming a rare earth element-containing material layer over the barrier layer.
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申请公布号 |
US2008121963(A1) |
申请公布日期 |
2008.05.29 |
申请号 |
US20060606812 |
申请日期 |
2006.11.29 |
申请人 |
GOVINDARAJAN SHRINIVAS |
发明人 |
GOVINDARAJAN SHRINIVAS |
分类号 |
H01L27/108;H01L21/322;H01L21/469 |
主分类号 |
H01L27/108 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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