| 摘要 |
<p>A vacuum pump having a pump body and a controller integrated together, in which the inside of the controller is appropriately cooled. In a control board on which an element producing a large amount of heat is mounted and that is in contact with a partition plate, the produced heat is directly transmitted from the control board to the partition plate and then transmitted to a cooling jacket through a sidewall. On the other hand, in a control board not in contact with the partition plate, heat produced by an element mounted on the control board is transmitted from the control board to air passing between stacked control boards. Consequently,air passing between the stacked control boards is heated. When the heated air passes through heat exchange fins cooled by cooling effect of the cooling jacket, the heat is transmitted to the heat exchange fins and the cooled air is fed again to the control board. Thus, heat produced by the control board is discharged to the outside not only through the partition plate but also through the air circulating in the controller.</p> |
